C. Girardeaux, et al.
J. Phys. IV France 132 (2006) 259-262
Effects of interface roughness on the local valence electronic structure at the SiO2/Si interface: Soft X-ray absorption and emission studyY. Yamashita1, S. Yamamoto1, K. Mukai1, J. Yoshinobu1, Y. Harada2, T. Tokushima2, Y. Takata2 and S. Shin1, 2
1 The Institute for Solid State Physics, The University of Tokyo, Kashiwa, Chiba 277-8581, Japan
2 Riken/SPring-8, Sayo-gun, Hyogo 679-5148, Japan
We investigated effects of interface roughness on the local valence electronic structures at SiO2/Si interface in order to clarify the relation between interface structures and interface electronic properties, by using soft X-ray absorption and emission spectroscopy. For atomically smooth interface, the local valence structures depend on intermediate oxidation states at the interface. For atomically rough interface, on the other hand, the local valence structures at the interface show amorphous-like electronic states irrespective of the intermediated oxidation states.
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