J. Phys. IV France
Volume 112, October 2003
Page(s) 1215 - 1215

J. Phys. IV France
112 (2003) 1215
DOI: 10.1051/jp4:20031104

Ti-Ni sputter-deposited SMA thin films and their applications to microactuators

S. Miyazaki and M. Hirano

University of Tsukuba, Institute of Materials Science, Tsukuba, Ibaraki 305-8573, Japan

Without abstract

© EDP Sciences 2003
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