J. Phys. IV France
Volume 104, March 2003
Page(s) 197 - 201

J. Phys. IV France
104 (2003) 197
DOI: 10.1051/jp4:200300060

Hard real time control software for use in electron beam lithography with an emphasis on patterns with radial symmetry

S. Heim, S. Rudolph, D. Rudolph and G. Schmahl

Institute for X-Ray Physics, Georg-August-Universität Göttingen, Geiststrasse 11, 37073 Göttingen, Germany

In order to overcome the limitations with existing electron beam lithography control Systems a complete beam control software System has been implemented from scratch, therefore allowing for optimizations especially for patterns with radial symmetry during each stage of the deployment process.

© EDP Sciences 2003