J. Phys. IV France 12 (2002) Pr3-179
Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuitsM. Schicke and K.-F. Schuster
Institut de Radio Astronomie Millimétrique, IRAM, 300 rue de la Piscine, 38406 Saint-Martin-d'Hères, France
Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature ( <150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.
© EDP Sciences 2002