J. Phys. IV France 11 (2001) Pr11-337-Pr11-342
Doping of SrTiO3 thin films studied by spectroscopic ellipsometryL. Pellegrino, M. Canepa, G. Gonella, E. Bellingeri, D. Marré, A. Tumino and A.S. Siri
INFM, Dipartimento di Fisica, via Dodecaneso 33, 16146 Genova, Italy, and INFM-LAMIA, Corso Perrone 24, 16152 Genova, Italy
The knowledge of thickness, optical properties and doping profiles of thin film sarnples is essential in view of their application in electronic devices. Here we present spectroellipsometric analysis on metallic oxygen deficient SrTiO3 thin films grown by pulsed laser deposition on SrTiO3 substrates. Such rnaterial is very interesting for applications in oxide electronics, having very large dielectric constant in the insulating state and becoming a metal with very high mobility with doping concentration as low as 1018 e/cm3. First results indicate that SrTiO3 thin films present a depressed optical absorption in the UV range above the energy gap and an absorption in the infrared region which is enhanced in respect to the bulk material.
© EDP Sciences 2001