J. Phys. IV France 11 (2001) Pr11-193-Pr11-197
Pulsed laser deposited barium strontium titanate thin films : Cristallographic and dielectric characterizationsS. Liebus, C. Girault-Di Bin, F. Cosset, A. Celerier and J.C. Vareille
Laboratoire IRCOM, UMR 6615 du CNRS, Équipe Composants et Circuits Microélectroniques et Microoptiques, 123 avenue Albert Thomas, 87060 Limoges cedex, France
The use of thin films of ferroelectric materials as a non-linear dielectric at microwave frequencies and the integration of tunable dielectrics is actively being investigated for a variety of advanced high frequency applications. This paper is devoted to the elaboration of SrxBa1-xTiO3 (BST) thin films by the pulsed laser deposition technique. The influence of several parameters like substrate temperature and oxygen pressure on the characteristics of these films are investigated by X-ray diffraction for the crystallographic structure and Rutherford Backscattering Spectroscopy for the composition. A cavity resonator technique is used to determine the relative dielectric permittivity of the BST layers.
© EDP Sciences 2001