J. Phys. IV France 11 (2001) Pr3-661-Pr3-667
Volatility studies on single source precursors for LaNiO3 film deposition: Mass spectrometry and thermal analysisN. Kuzmina1, I. Malkerova1, M. Ryazanov1, A. Alikhanyan1, A. Rogachev1 and A.N. Gleizes2
1 Moscow State University, Department of Chemistry, 119899 Moscow, Russia
2 Institut National Polytechnique de Toulouse, ENSIACET, CIRIMAT, UMR 5085 du CNRS, 118 route de Narbonne, 31077 Toulouse cedex, France
Four volatile heterobimetallic complexes [Ni(Q)La(dik)3] [H2Q = condensation product of 1,2-diaminoethane with salicylic aldehyde or pentane-2,4-dione, Hdik = 1,1,1,5,5,5-hexafluoro-pentane-2,4-dione 1,1,1- trifluoro-5,5,-dimethylhexane-2,4-dione] were selected as prospective single source precursors for LaNiO3 film deposition. Thermal analysis under vacuum, isothermal vacuum sublimation and mass spectrometry were used for comparatively characterizing volatility and thermal stability of the heterobimetallic complexes. The problem of intact sublimation of [Ni(Q)La(dik)3] is discussed in correlation with the nature of the ligands - Q2- and dik- - and solid state features of the complexes.
© EDP Sciences 2001