J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
Page(s) Pr3-617 - Pr3-619
Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-617-Pr3-619

DOI: 10.1051/jp4:2001378

Investigation of composition, optical and electrophysical properties of tin dioxide films made by oxidative pyrolysis of tetraethyltin

B. Kozyrkin

ELMOS, 330-64, 103482 Moscow, Russia

Deposition of the transparent electroconductive tin dioxide films was carried out using thermal decomposition of tetraethyltin in oxidative medium at normal and elevated pressure in the reactor of horizontal type. Investigation on the chemical composition, light transmission and electroresistance of SnO2 films, obtained in different conditions of deposition, are reported. The special features of the etching of the pyrolytic SnO2 films, aimed to create topological pattern for the electronic devices, were also investigated.

© EDP Sciences 2001