J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
Page(s) Pr3-593 - Pr3-599
Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-593-Pr3-599

DOI: 10.1051/jp4:2001375

MO CVD obtaining composite coatings from metal of platinum group on titanium electrodes

N.V. Gelfond, P.S. Galkin, I. K. Igumenov, N.B. Morozova, N.E. Fedotova, G.I. Zharkova and Yu.V. Shubin

Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Lavrentiev Ave. 3, Novosibirsk 630090, Russia

In the present paper we report obtaining composite coatings based on platinum metals by means of CVD technique. Platinum-, iridium- and ruthenium-containing coatings were deposited onto titanium substrates. Platinum bis-(2,4-pentanedionate), iridium tris-(2,4-pentanedionate), and ruthenium tris-(2,4-pentanedionate) were used as precursors. Corrosion resistance of the obtained samples is investigated with respect to the deposition conditions (substrate temperature and flow rate of the gas reagent - oxygen). Investigation was carried out using the electrolysis in sea water simulated solutions under active evolution of oxygen. It is stated that platinum coatings exhibit longer mean lifetime, in comparison with iridium and ruthenium samples. Service lifetime of the best electrodes exceeded 600 hours.

© EDP Sciences 2001