J. Phys. IV France 11 (2001) Pr3-1191-Pr3-1196
CVD modifications of porous Vycor silica for gas separation and sensor applicationsE. Magoulianti1, K. Beltsios1, D. Davazoglou2 and N. Kanellopoulos1
1 Institute of Physical Chemistry, NCSR Demokritos, 15310 Aghia Paraskevi, Attikis, Greece
2 Institute of Microelectronics, NCSR Demokritos, 15310 Aghia Paraskevi, Attikis, Greece
The work reviews approaches for the CVD-modification of Vycor silica tubes beyond the widely exposed method of plain asymmetric pore blocking. Both currently pursued routes as well as potential future approaches are described. The presentation covers the asymmetric narrowing of pores, the uniform but limited -in-degree deposition, the formation of double pore networks and the template approach. Modifications aim at the generation of membranes appropriate for gas and/or vapor separation or sensor applications.
© EDP Sciences 2001