J. Phys. IV France 11 (2001) Pr3-1023-Pr3-1028
APCVD-molybdenum oxide thin films : Vibrational and optical propertiesK.A. Gesheva1, T. Ivanova1, A. Szekeres2, A. Maksimov3 and S. Zaitzev3
1 Central Laboratory of Solar Energy and New Energy Sources, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria
2 Institute of Solid State Physics, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria
3 Institute of Solid State Physics, 142432 Moscow Area, Chernogolovka, Russia
Molybdenum oxide films were obtained at 200°C by Chemical Vapor Deposition of Mo(CO)6 at atmospheric pressure and at an optimal ratio of precursor vapors and oxygen. Vibrational and optical properties as dependent on process temperatures were investigated by Raman and Ellipsometric Spectroscopy. The as-deposited films are generally amorphous. A crystallization starts if films are heated at 200°C up to 500°C. Besides the basic Mo-O bands, after annealing a variety of additional vibrational bands was observed. This evidence for polycrystalline structure was also supported by the optical gap energy values found in the range of 2.72-3.63 eV typical for polycrystalline material.
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