J. Phys. IV France 09 (1999) Pr8-733-Pr8-739
Deposition of nanoscale rhodium dots by STM assisted CVDF. Marchi1, D. Tonneau1, R. Pierrisnard1, V. Bouchiat1, V. Safarov1, H. Dallaporta1, P. Doppelt2 and R. Even2
1 Faculté des Sciences de Luminy, Département de Physique, 13288 Marseille cedex 09, France
2 ESPCI, 10 rue Vauquelin, 75231 Paris, France
Direct patterning of nanometric metallic features is possible by local decomposition of gaseous molecules on a surface, induced by application of a pulse voltage on a STM tip while surface imaging. Decomposition reaction occurs above a threshold voltage of 2.7 V corresponding to an electric field of about 5.4 107 V.cm-1 between STM tip and sample. Metallic Rhodium dots as small as 3 nm can be deposited using this method. The kinetics of formation of these dots are discussed and a reaction mechanism is proposed.
© EDP Sciences 1999