J. Phys. IV France 09 (1999) Pr8-259-Pr8-264
In-situ mass spectrometric study of the reaction mechanism in MOCVD of Pyrite (FeS2)L. Reijnen, B. Meester, A. Goossens and J. Schoonman
Laboratory for Inorganic Chemistry, Julianalaan 136, 2628 BL Delft, The Netherlands
Pyrite, FeS2, thin films have been prepared by MOCVD using tert-butyldisulfide (TBDS), iron(III) acetylacetonate (Fe(acac)3), and H2 as the precursors. The reaction mechanism is studied by using in-situ mass spectrometry. The thermal decomposition of TBDS and Fe(acac)3 has been investigated, as well as the synthesis of FeS2. A complicated gas-phase reaction chain occurs in the deposition reaction. In the first 1-2 cm of the deposition zone, a thick, rough film is formed, but further downstream in the reactor, a smooth FeS2 film is obtained. This change in morphology is accounted for in the proposed reaction mechanism.
© EDP Sciences 1999