J. Phys. IV France 09 (1999) Pr8-229-Pr8-236
Kinetics of film growth in CVD reactionsK.T. Raic
Belgrade University, Faculty of Technology and Metallurgy, Kamegijeva 4, 11001 Belgrade, Yugoslavia
Theoretical aspect of film growth kinetics is discussed. Two approaches : microstuctural and transport phenomena are presented. An original model defined by the simplified laminar boundary layer theory is suggested. Using an example of experimental measurements, taken korn the literature, it is shown that it is not always easy to distinguish clearly between the various time laws to follow the real kinetics of CVD film growth.
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