J. Phys. IV France 09 (1999) Pr8-93-Pr8-99
CVD niobium in Nb-Hal-(H)-inert gas systems : A thermodynamic and experimental approachesA.N. Golubenko1, S.V. Sysoev2, A.A. Titov2 and Yu.G. Stenin2
1 Novosibirsk State University, Novosibirsk 630090, Russia
2 Institute of Inorganic Chemistry, SB RAS, Lavrentjev Ave. 3, Novosibirsk 630090, Russia
The thermodynamic analysis of the niobium CVD in Nb-Hal-(H)-inert gas (Hal = l, Cl) systems has been performed with using the method of minimization of the Gibbs' free energy for the wide region of conditions. The results of the thermodynamic calculations allow to select the Nb-I-inert gas system as the more preferable hydrogen free system. The experimental niobium CVD data in the Nb-Cl-H-inert gas system were analyzed with thermodynamic view. The calculations and experimental results show a good agreement.
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