J. Phys. IV France 09 (1999) Pr8-929-Pr8-934
New volatile heterocyclic metal diketonates for MOCVDA. Drozdov1, S. Troyanov1, O. Fedorchenko1, G. Battiston2, C. Pettinari3, F. Marchetti3 and A. Cingolani3
1 Inorganic Chemistry Department, Moscow State University, Vorobjevy Gory, 119899 Moscow, Russia
2 ICTIMA-CNR, corso Stati Uniti 4, 35127 Padova, ltaly
3 Dipartimento di Scienze Chimiche, Universita degli Studi di Camerino, via S. Agostino I, 62032 Camerino, ltaly
The new type of β-diketonate ligand, 4-acylpyrazol-5-ones were used for preparation of copper(II) and barium complexes. Two copper and two barium complexes containing neutral N- and O-donor ligands (such as phen, dipy, tetraglyme) have been structurally characterized by single crystal X-ray diffractometry. The volatility of copper compounds obtained has been studied. The preliminary CVD experiments have been conducted.
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