J. Phys. IV France 09 (1999) Pr8-805-Pr8-809
Study of sensing complex thin films prepared by PECVD method to H2SG. Dai and Y. Wu
Department of Electronic Engineering, Jilin University, Changchun 130023, China
SnO2 thin films were prepared using SnCl4 and O2 as precursors by means of plasma enhanced chemical vapour deposition method (PECVD) , and were modified with CuO by soaked technique to form a SnO2-CuO-SnO2 sandwich structure. The sensing complex thin films were proved to be highly sensitive and selective to H2S. Furthermore, the response and recovery speed of the thin films was fairly quick.
© EDP Sciences 1999