J. Phys. IV France 08 (1998) Pr7-241-Pr7-256
ICP diagnostics with magnetic probesV.A. Godyak and R.B. Piejak
OSRAM SYLVANIA INC., 71 Cherry Hill Drive, Beverly, MA 01915, U.S.A
Magnetic probe (B-dot) diagnostics of inductively coupled plasmas are reviewed in this lecture. The diagnostic fundamentals, the relationships between the measured B-dot signals and the rf electric fields and currents in an ICP, the design of B-dot experiment and the results of B-dot measurements carried out over a wide range of ICP parameters are discussed here. It is shown that commonly used B-dot probes enclosed in a dielectric shell significantly disturb the measured B-dot signals and may lead to erroneous results. Some new results on the electromagnetic field and rf current distribution measured in a cylindrical ICP with a flat inductor coil are discussed in terms of anomalous skin effect.
© EDP Sciences 1998