J. Phys. IV France 08 (1998) Pr7-195-Pr7-203
Holey-plate structure surface-wave plasma sourceY. Yoshida
Department of Mechanical System Engineering, Yamanashi University, Kofu, Yamanashi 400, Japan
A low-pressure and high-density microwave discharge, created and sustained by a surface wave, using a partial-coaxial cavity resonator have been studied. One flat surface of a dielectric disk, which is set at the terminal of the cavity, is in contact with an inner conductor. The other surface is covered with a holey plate. An evanescent electric field is produced from the holey plate to a plasma production chamber of 40 mm diameter. The plasma density is 6 x 1011 cm-3 with an electron temperature of 3 eV at an argon gas pressure of 1 Pa using a holey plate with 169 holes that are 1.7 mm in diameter.
© EDP Sciences 1998