J. Phys. IV France 08 (1998) Pr7-21-Pr7-32
Modeling of microwave reactors : microwave and kinetics in gas flow approachesG. Gousset
Laboratoire de Physique des Gaz et des Plasmas, bâtiment 210, Université de Paris-Sud Orsay, 91405 Orsay cedex, France
The modeling of microwave plasma reactors must couple the external hf field to the kinetics of charged particles and neutral species in presence of a gas flow. Various approaches to solve the non-linear coupled equations which describe the physical situation, are proposed and discussed in this paper.
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