J. Phys. IV France 08 (1998) Pr3-193-Pr3-195
Miniature temperature sensors based on Ge filmsV.F. Mitin1, 2
1 Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine, Prospect Nauki 45, 252650 Kiev 28, Ukraine
2 Microsensor Co. Ltd., P.O. Box 95, 252108 Kiev, Ukraine
Miniature (1.2 mm diameter x 1.0 mm long) cryogenic temperature sensors have been developed. They are based on germanium films on gallium arsenide substrates and are intended to operate in a wide (0.05 K to 300 K) temperature range. Their thermometric charactenstics are investigated at temperatures from 1.7 K to 300 K. A production of these sensors is organized.
© EDP Sciences 1998