J. Phys. IV France 08 (1998) Pr3-25-Pr3-28
Back gate voltage and buried-oxide thickness influences on the series resistance of fully depleted SOI MOSFETs at 77 KA.S. Nicolett1, J.A. Martino2, E. Simoen3 and C. Claeys3
1 Faculdade de Tecnologia de São Paulo, Brazil
2 Laboratório de Sistemas Integráveis, Universidade de São Paulo, Brazil
3 IMEC, Leuven, Belgium
This work studies the influence of the back gate voltage on the LDD SOI nMOSFETs series resistance at 300 K and 77 K and corresponding to two different buried oxide thicknesses. The MEDICI simulated results were used to support the analysis. It was observed that for lower buried oxide thickness the influence of the back gate bias is higher, mainly at 77 K. However, this influence becomes negligible when the back interface below the LDD region is inverted and the depletion region in the LDD reaches its maximum saturation value.
© EDP Sciences 1998