J. Phys. IV France 07 (1997) C4-235-C4-246
Production of Large Diameter ECR PlasmaY. Kawai and Y. Ueda
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
The production of a large diameter ECR plasma with microwaves of frequency 2.45 GHz is reviewed, including our experimental results with a multi-slot antenna and a TE01 mode microwave converter. It is pointed out that the electromagnetic waves play an important role in plasma uniformity as well as plasma production. Furthermore, it is found that the X wave contributes to plasma uniformity for electron density of (1-2)x1017m-3 which almost corresponds to the L cutoff.
© EDP Sciences 1997