J. Phys. IV France 07 (1997) C4-15-C4-29
A Guide to Laser-Induced Fluorescence Diagnostics in PlasmasT.G.M. Freegarde and G. Hancock
Physical and Theoretical Chemistry Laboratory, Oxford University, South Parks Road, Oxford OX1 3QZ, U.K.
A brief guide is presented for the use of laser induced fluorescence (LIF) as a diagnostic for reactive species in plasmas. The technique can determine concentrations, energies, and kinetics of atoms, radicals and ions, and can also be used to measure the fields which influence the motion of the charged particles. Measurements can be made in a spatially selective fashion within the plasma reactor, and in a way which is non-invasive. The review gives examples of all these types of measurements, with emphasis on how quantitative information can be extracted ftom the LIF signals. Guides are given to the limits of species detectivity, and to the pitfalls which need to be avoided if the technique is to be used reliably.
© EDP Sciences 1997