J. Phys. IV France 7 (1997) C2-1149-C2-1150
XAS Study on the Intermediate Species Formed During the Surface Oxidation of CrN FilmsF. Esaka1, K. Furuya1, H. Shimada2, M. Imamura2, N. Matsubayashi2, T. Sato1, A. Nishijima2, T. Kikuchi3, A. Kawana4 and H. Ichimura4
1 Department of Applied Chemistry, Faculty of Science, Science University of Tokyo, 1-3, Kagurazaka, Shinjuku-ku, Tokyo 162, Japan
2 National Institute of Materials and Chemical Research, 1-1, Higashi, Tsukuba, Ibaraki 305, Japan
3 Science University of Tokyo in Yamaguchi, 1-1-1, Daigakudori, Onoda, Yamaguchi 756, Japan
4 Sumitomo Metal Mining Co. Ltd., 3-18-5, Nakakokubun, Ichikawa, Chiba 272, Japan
XAS was applied to the identification of the intermediate species formed during the surface oxidation of CrN films. The N K-edge XAS spectra indicated formation of an intermediate species which gave a feature at 401.4 eV. A high resolution XAS spectrum exhibited that the feature at 401.4 eV has the same vibration splitting as that of gaseous N2. It was also found that the species assigned to molecular N2 occurred in the interstitial position of the surface oxide layer in the oxidized films. The result implied the importance of high energy resolution XAS in the field of material science.
© EDP Sciences 1997