J. Phys. IV France 07 (1997) C1-741-C1-742
Crystal Structure and Magnetic Properties of Post-Annealed Ba-Ferrite Thin Films for High Density Recording MediaA. Morisako1, X. Liu1, F. Wada1, S. Takei1, M. Matsumoto1 and M. Naoe2
1 Department of Information Engineering, Shinshu University, 500 Wakasato, Nagano 380, Japan
2 Department of Physical Electronics, Faculty of Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152, Japan
Hexagonal Ba-ferrite films have been prepared at room temperature by facing targets sputtering (FTS) system and they were annealed to crystallize at 900°C in air. In this paper, the dependence of the annealing time on grain size of post-annealed Ba-ferrite films has been studied. It was found that the annealing time of 45sec is sufficient for the crystallization without apparent grain growth under the temperature of 900°C and the post-annealed Ba-ferrite films exhibit isotropic magnetic property.
© EDP Sciences 1997