J. Phys. IV France 07 (1997) C1-629-C1-630
Ferromagnetic Characteristics of a Perovskite Type of (La, Sr)MnO3 Films Deposited by Kr SputteringN. Matsushita, K. Noma,, S. Nakagawa and M. Naoe
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152, Japan
La1-xSrxMnO3 films about 4000 Å thic were deposited by sputtering from the targets with composition of La0.76Sr0.24Mn0.78O3.0-y mixture of Kr and O2. Although the orientation of (110) in which metallic ions are most closely packed was preferential for films deposited in the gas mixture of Ar and O2, the orientation of (111) in which large ions such as O2-, La3+ and Sr2+ are most closely packed was also observed in the X-ray diffraction diagrams. The maximum saturation magnetization of the as-deposited films in Kr and O2 was 0.17 kG and it increased up to 2.4 kG for the film post-annealed at 1000°C for 3 hours in oxygen atmosphere. This value was larger than that of the film deposited in Ar and O2 and annealed under the same condition. It seemed that the recoiled particles to the growing film surface and the atoms incorporated into the film were decreased in sputtering process by using Kr and therefore, larger 4πMs was obtained.
© EDP Sciences 1997