J. Phys. IV France 07 (1997) C1-487-C1-488
Increase of Saturation Magnetization of Ba Ferrite Films Deposited by Adding Xe Into Sputtering Gas MixtureK. Noma, N. Matsushita, S. Nakagawa and M. Naoe
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152, Japan
Ba ferrite thin films with well c-axis orientation were deposited by means of three sputtering systems and the relationships among their microstructure, magnetic characteristics and plasma parameters were discussed. It was clearly confirmed that the suppression of heavy bombardment of energetic particles to the surface of the growing film was the most important for attaining the excellent crystallographic and magnetic characteristics.
© EDP Sciences 1997