Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids
J. Phys. IV France 06 (1996) C8-799-C8-802
Elasticity Study on Ag nm-FilmsH. Mizubayashi, S. Harada and T. Yamaguchi
Institute of Materials Science, University of Tsukuba, Tsukuba 305, Japan
Young's modulus Ef of polycrystalline Ag nm-films deposited on hydrogen-terminated Si was measured in the film thickness d range between 6 and 50 nm by means of the vibrating reed method. Ef observed for d above about 20 nm is slightly higher than the upper bound of Young's modulus expected for polycrystalline Ag bulk-films. On the other hand, with decreasing d, Ef decreases beyond the lower bound of Young's modulus expected for polycrystalline Ag bulk-films. The plausible models to explain these results are discussed.
© EDP Sciences 1996