Eleventh International Conference on Internal Friction and Ultrasonic Attenuation in Solids
J. Phys. IV France 06 (1996) C8-643-C8-646
Internal Friction of Amorphous Zr65Al7.5Cu27.5-FilmsL. Kempen1, U. Harms1, H. Neuhäuser1, D. Scholz2, E. Peiner2 and A. Schlachetzki2
1 Institut für Metallphysik und Nukleare Festkörperphysik, Germany
2 Institut für Halbleitertechnik, Technische Universität, 38106 Braunschweig, Germany
Using a vibrating reed device with micro structurized Si reeds the dynamic mechanical properties Young's modulus and damping of thin films deposited on the reeds are measured simultaneously with the curvature of the specimen. The curvature yields the internal stress of the film. As an example, measurements on amorphous Zr65Al7.5Cu27.5 -films are shown and compared with measurements on amorphous splat cooled specimen of the same composition. A pronounced damping peak in the thin films is observed slightly below room temperature which is attributed to hydrogen relaxation jumps.
© EDP Sciences 1996