Proceedings of the 43rd International Field Emission Symposium
J. Phys. IV France 06 (1996) C5-285-C5-289
Construction of STM Aligned Electron Field Emission SourceJ.Y. Park1, H.-J. Choi1, Y. Lee2, S. Kang2, K. Chun2, S.W. Park3 and Y. Kuk4
1 Department of Physics, Seoul National University, Seoul 151-742, Korea
2 Department of Electronics Engineering, Seoul National University, Seoul 151-742, Korea
3 Department of Control and Instrumentation Engineering, Seoul City University, Seoul 130-143, Korea
We constructed a scanning tunneling microscope aligned field emission (SAFE) source by using silicon micro-fabricated electrostatic lenses. The system consists of an STM aligned field emitter, 5µm extractor, 100µm accelerator, beam dump, quadrupole deflector and einzel lens. The microlenses were made by using silicon processing techniques. The system can be operated from 200 to 2 kV, resulting in a beam current of tens of nA and with the diameter of ≈ 0.1 µm when a sample was placed less than 2 mm away from the exiting einzel lens. In order to measure the spherical and chromatic aberrations, a detector and cylindrical electron energy analyzer were attached to the micro-column.
© EDP Sciences 1996