Proceedings of the Second European Workshop on Low Temperature Electronics
J. Phys. IV France 06 (1996) C3-403-C3-408
Express-Control of Superconducting Microcircuits Technology by Anodization Spectroscopy MethodT.S. Lebedeva, S.Ya. Navala, P.B. Shpilevoy and I.D. Vojtovich
Lyatoshinskogo st. 26" 6", fl.4, 252191 Kiev, Ukraine
Results of investigation of anodization process in thin-film microelectronic structures are presented. Anodization spectroscopy method, a new high-resolution way of studying films and thin-film structures, is developed for the express-control of superconducting microcircuits technology based on niobium and aluminium. The performed rapid analysis enables to control efficiently and to correct the technological process and make it possible to estimate the quality and output parameters of fabricated microcircuits. The new method is represented for measuring the size departure in cryoelectronic elements during etching and anodizing of edges directly in the process of microcircuits manufacture.
© EDP Sciences 1996