J. Phys. IV France 05 (1995) C5-601-C5-605
Laser-CVD 3D Rapid Prototyping of Laser Driven Moveable Micro-ObjectsO. Lehmann and M. Stuke
Max-Planck-Institut für Biophysikalische Chemie, P.O. Box 2841, 37018 Göttingen, Germany
Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors trimethylamine alane (CH3)3NAlH3 and oxygen, free-standing three-dimensional (3D) Al2O3 ceramic microstructures can be directly written under software control. By suitable laser irradiation, parts of these 3D microobjects can be moved through thermal expansion forces. This is a first step towards laser rapid prototyping of optically driven 3D microobjects such as microtweezers and microrobots. Examples will be presented.
© EDP Sciences 1995