J. Phys. IV France 05 (1995) C5-89-C5-96
Mass Spectrometric Study of the Gas Phase During Chemical Vapor Deposition of Pyrolytic CarbonF. Fau-Canillac, F. Carrere, A. Reynes, C. Vahlas and F. Maury
Laboratoire de Matériaux, URA 445, 118 Route de Narbonne, 31077 Toulouse, France
The pyrolysis of CH4, of C3H8 and of the mixture 20C3H8/80CH4 was investigated in a hot wall CVD reactor by mass spectrometry. Experiments were conducted as a function of temperature and of surface-to-volume (S/V) ratio of the substrate. The main by-products of the pyrolysis were identified and reaction mechanisms were proposed taking into account homogenous decomposition/formation reactions. Cyclic species are possibly involved in the formation mechanism of pyrocarbon.
© EDP Sciences 1995