J. Phys. IV France 04 (1994) C9-245-C9-251
High resolution Bragg-Fresnel optics for nanometer scale methods with soft X-raysA. Erko
Institute of Microelectronics Technology, Russian Academy of Sciences, Laboratory of X-Ray Optics and Technology, 142432 Chernogolovka, Russia
The main principles and some applications of Bragg-Fresnel multilayer optics are described. An elliptical Bragg-Fresnel multilayer lens (BFML), designed and fabricated in the IMT RAS has been used for 2-dimensional focusing of the white X-ray synchrotron beam. For the beam energy of about 12 KeV the spot size checked with the knife edge method was about 1µm. As an example of a successful application of this optical element in x-ray imaging, the fluorescence X-Ray scanning LURE-IMT microprobe is discussed. The results of 2-D scanning images with submicron resolution of a test object in transmission and fluorescence mode are also presented.
© EDP Sciences 1994