8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-233-C7-236
Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating techniqueQ. Shen, A. Harata and T. Sawada
Department of Industrial Chemistry, Faculty of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.
© EDP Sciences 1994