8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-203-C7-206
Second harmonic modulated photo-reflectance imaging of integrated circuitsZ.-L. Qian, S.-Y . Zhang, Y.-S. Lu, J. He and M. Tao
Institute of Acoustics and Lab. of Modern Acoustics, Nanjing University, Nanjing 210093, China
The second harmonic imaging of the modulated photoreflectance (MPR) signals of integrated circuits has been obtained. The second harmonic imaging has special NDE capability for some surface and subsurface structures of semiconductor devices, particularly for the ion implantation process, based on the distinctive mechanism of the nonlinear MPR effect.
© EDP Sciences 1994