8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-167-C7-170
In-situ investigation of ion implantation processes by thermal wave analysisH. Schlemm1, H.D. Geiler2 and A. Kluge3
1 FSU Jena, Inst.f. Festkörperphysik, Helmholtzweg 5, 07743 Jena, Germany
2 Jenawave Engn. & Consult., Friedrich-Schelling-Str. 11, 07745 Jena, Germany
3 FHG, IIS Erlangen, Artilleriestr. 12, 91052 Erlangen, Germany
High-fluence N+-implantation in steel is monitored by use of nondestructive and contactless photothermal measurements during the implantation process. The modulated reflectivity is correlated with the results of Knoop hardness testing. On-line measurements on the steel surface and direct ion beam monitoring from the back side of a monitor sample are demonstrated. The maximum of the ion implantation induced hardness is strongly correlated with the phase transition indicated by the thermomodulated dielectric function.
© EDP Sciences 1994