8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-709-C7-711
The interaction of fine particles with laser-generated nonlinear surface acoustic wavesV.G. Mikhalevich1, Al.A. Kolomenskii1, E.C. Benck2 and H.A. Schuessler2
1 General Physics Institute, Moscow 117942, Russia
2 Department of Physics, Texas A&M University, College Station, TX 77843-4242, U.S.A.
The cleaning of a silicon surface from dust particles using laser-induced surface acoustic pulses is investigated. It is shown that nonlinear acoustic waves displace particles not only perpendicular but also parallel to the surface and are therefore more effective in particle removal than are linear acoustic waves.
© EDP Sciences 1994