8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-615-C7-618
Photoacoustic angular resonance spectroscopy for characterizing thin filmsH.-P. Shao, S.-Y. Zhang and Y.-S. Jing
Institute of Acoustics and Lab. of Modern Acoustics, Nanjing University, Nanjing 210008, China
The photoacoustic angular resonance spectroscopy combining both the angular resonance and photoacoustic techniques is presented, which gives several advantages comparing with the traditional methods. The mechanism of the photoacoustic angular resonance spectroscopy for simultaneously determining the thickness and the refractive index of a film is discussed with extended contents. It is also demonstrated that the technique has special capabilities in quantitative non-destructive evaluation of thin films.
© EDP Sciences 1994