8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-11-C7-14
Description of an interferometric photothermal microscope and its application to the study of semiconductor samplesK. Haupt1, A. Glazov1, H.G. Walther1 and E. Döpel2
1 Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany
2 Fraunhofer-Institut für Angewandte Optik und Feinmchanik, Schillerstrasse 1, 07745 Jena, Germany
A computerized scanning microscope is described which is equipped with a photothermal sensor. Two types of sensors have been developed both being based on probing the thermal lens above the heating spot by a Mach-Zehnder interferometer. One interferometer was built up from separate optical components while the other one was designed as a microoptical block connected by a gradient index lens and optical fibres with a laser diode and a photodiode. Measurements from structured semiconductors are presented demonstrating the performance of the photothermal microscope.
© EDP Sciences 1994