3rd French conference on acoustics
J. Phys. IV France 04 (1994) C5-1229-C5-1232
Visualization of surface acoustic waves by scanning electron microscopyD.V. ROSHCHUPKIN1, 2, M. BRUNEL2 and L. TUCOULOU2
1 Institute of Microelectronic Technology, Russian Academy of Sciences, 142432 Chernogolovka, Moscow District, Russia
2 CNRS, Laboratoire de Cristallographie, BP. 166X, 38042 Grenoble cedex, France
This paper reports a scanning electron microscopy visualization of surface acoustic waves in single- and poly-domains LiNbO3 crystals. This SEM method is very useful to visualize traveling and standing surface acoustic waves in SAW-devices and to observe the interaction between SAWs and defects on crystal surfaces. Furthermore, we investigated the interaction between SAWs and regular domain structures in LiNbO3 crystals.
© EDP Sciences 1994