CHANGEMENTS DE PHASES ET MICROSTRUCTURES
J. Phys. IV France 04 (1994) C3-273-C3-277
TEM and EXAFS study of Ar+ implanted Mo thin filmsJ.F. DINHUT and P. CHARTIER
Laboratoire de Métallurgie Physique, URA 131 du CNRS, Université de Poitiers, 40 Avenue du Recteur Pineau, 86022 Poitiers cedex, France
TEM observations and CEEXAFS measurements of Ar+ implanted molybdenum films were performed. The appearance of a fcc phase is clearly identified with the two characterisation techniques and the lattice parameter is shown to be a = 0.420 nm. No solid argon bubbles can be detected. An interpretation is given based on the possible interna1 stresses created by Ar+ implantation.
© EDP Sciences 1994