Numéro
J. Phys. IV France
Volume 04, Numéro C3, Février 1994
36ème Colloque de Métallurgie de l'INSTN
CHANGEMENTS DE PHASES ET MICROSTRUCTURES
Page(s) C3-273 - C3-277
DOI http://dx.doi.org/10.1051/jp4:1994337
36ème Colloque de Métallurgie de l'INSTN
CHANGEMENTS DE PHASES ET MICROSTRUCTURES

J. Phys. IV France 04 (1994) C3-273-C3-277

DOI: 10.1051/jp4:1994337

TEM and EXAFS study of Ar+ implanted Mo thin films

J.F. DINHUT and P. CHARTIER

Laboratoire de Métallurgie Physique, URA 131 du CNRS, Université de Poitiers, 40 Avenue du Recteur Pineau, 86022 Poitiers cedex, France


Abstract
TEM observations and CEEXAFS measurements of Ar+ implanted molybdenum films were performed. The appearance of a fcc phase is clearly identified with the two characterisation techniques and the lattice parameter is shown to be a = 0.420 nm. No solid argon bubbles can be detected. An interpretation is given based on the possible interna1 stresses created by Ar+ implantation.



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