Troisiéme Conférence Européenne sur les Matériaux et les Procédés Avancés
J. Phys. IV France 03 (1993) C7-2189-C7-2192
Crystallization study of amorphous Mn1-xCx films prepared by RF magnetron sputteringA. AOUNI and E. BAUER-GROSSE
Laboratoire de Science et Génie des Surfaces, URA 1402 du CNRS, Ecole des Mines, Parc de Saurupt, 54042 Nancy cedex, France
For the first time, Mn1-xCx amorphous films with [MATH] were obtained by RF magnetron sputtering. Their thermal stability was studied by DSC and hot stage TEM. For [MATH], the crystallization of amorphous alloys leads to the formation of known triangular prismatic sheet (TPS) carbides such as Mn3C and Mn5C2, and in addition, to the formation of new metastable TPS carbides having either periodic structures which correspond to Mn2n+1Cn formula with n = 3 and n = 4 or one-dimensional aperiodic structures with the Mn1-yCy formula. This structure type can lead to the TPS Mn2C carbide which have been detected for x = 0.34. For [MATH] a new percarbide Mn2C, for which C atoms are in octahedral interstices, is observed.
© EDP Sciences 1993