Numéro
J. Phys. IV France
Volume 03, Numéro C7, Novembre 1993
The 3rd European Conference on Advanced Materials and Processes
Troisiéme Conférence Européenne sur les Matériaux et les Procédés Avancés
Page(s) C7-1377 - C7-1382
DOI http://dx.doi.org/10.1051/jp4:19937210
The 3rd European Conference on Advanced Materials and Processes
Troisiéme Conférence Européenne sur les Matériaux et les Procédés Avancés

J. Phys. IV France 03 (1993) C7-1377-C7-1382

DOI: 10.1051/jp4:19937210

Carbon coatings on optical fibres by PECVD

V. VERBRUGGE1, L. SEGERS1, R. WINAND1, M.N. CHARASSE2, C. QUINTY2 and J.P. LE PESANT2

1  Service Métallurgie-Electrochimie Cp 165, Université Libre de Bruxelles, 50 Av F.D. Roosevelt, 1050 Bruxelles, Belgium
2  THOMSON CSF, Laboratoire Central de Recherche, Domaine de Corbeville, 91404 Orsay, France


Abstract
An RF plasma CVD equipment was built for carbon coating on moving optical fibres. The effects of process parameters and gas composition on coating properties and deposition rate were investigated. Finally best results were obtained with C2H2-Ar plasmas. Homogeneous deposits could be obtained with a typical growth rate of 50 nm/s at fibre drawing speeds up to 2m/s.



© EDP Sciences 1993