Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-385 - C3-390
DOI http://dx.doi.org/10.1051/jp4:1993353
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-385-C3-390

DOI: 10.1051/jp4:1993353

Rare earth β-diketonate and carboxylate metal complexes as precursors for MOCVD of oxide films

N.P. KUZMINA, L.I. MARTYNENKO, Z.A. TU, A.R. KAUL, G.V. GIRICHEV, N.I. GIRICHEVA, A.N. RYKOV and Y.M. KORENEV

Department of Chemistry, Moscow State University, Moscow 119889, Russia


Abstract
Volatile and thermostable complexs of lanthanide acetylacetonates and pivalates were obtained and investigated by different methods. These compounds were used for lanthanide oxide containing film producing and for fabrication of silica optical fibers doped by lanthanide oxide. The properties of these and already known volatile precursors are compared.



© EDP Sciences 1993