Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-379 - C3-384
DOI http://dx.doi.org/10.1051/jp4:1993352
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-379-C3-384

DOI: 10.1051/jp4:1993352

Synthesis and properties of barium diketonates as precursors for MOCVD

A.A. DROZDOV, S.I. TROYANOV, N.P. KUZMINA, L.I. MARTYNENKO, A.S. ALIKHANYAN and I.P. MALKEROVA

Department of Chemistry, Moscow State University, Moscow 119889, Russia


Abstract
The structures of barium diketonates depend on the way in which they are synthesized. It is shown that there is a correlation between the volatility of these compounds and their crystal structures. A new volatile mononuclear adduct of barium dipivaloylmethanate suitable for MOCVD is suggested.



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