Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-353 - C3-360
DOI http://dx.doi.org/10.1051/jp4:1993348
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-353-C3-360

DOI: 10.1051/jp4:1993348

YBa2Cu3O7-x thin films deposition on YSZ substrates by MOCVD

J. SANTISO and A. FIGUERAS

Institut de Ciència de Materials de Barcelona, C.S.I.C., Campus UAB, 08193 Bellaterra, Spain


Abstract
The evaporation process of β-diketonate precursors for the MOCVD deposition of YBa2Cu3O7-x superconducting films has been investigated by thermogravimetric analysis. Special attention has been paid to the Ba(thd)2 precursor. A simple model of the reactions involved in this process has been described. YBa2Cu3O7-x superconducting layes were deposited on YSZ substrates by MOCVD in a horizontal hot-wall reactor. Films showed a mixture of c-axis and a-axis orientation and have a Tc(R=0)=88.2K and Tc onset=91.6K



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