J. Phys. IV France 03 (1993) C3-265-C3-272
Deposition of titanium-based films by laser-assisted thermal CVD of titanium tetrachlorideR. ALEXANDRESCU1, R. CIREASA1, B. DRAGNEA1, I. MORJAN1, I. VOICU1 and A. ANDREI2
1 Laser Department, Institute of Atomic Physics, Bucharest MG-6, 76900, Romania
2 Institute for Nuclear Research, Pitesti, Romania
The results of a study of laser-assisted CVD of thin titanium films from TiCl4 using a CO2 laser are pesented. The Ti-based layers deposited onto quartz substrates were investigated by XPS technics. The influence of the incident laser energy on the chemical content of films as well as on the film growth rate was pointed out. The experimental results indicate that, on quartz substrate a multilayer structure is formed with unsaturated TiSix at the interface and oxidized phases at the surface.
© EDP Sciences 1993