Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-203 - C3-203
DOI http://dx.doi.org/10.1051/jp4:1993326
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-203-C3-203

DOI: 10.1051/jp4:1993326

Monte Carlo simulation on the step coverage formation processes in chemical vapor deposition

Y. SHIMOGAKI, T. UCHIDA, S. SHIGA, Y. EGASHIRA and H. KOMIYAMA

Department of Chemical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan

Without abstract




© EDP Sciences 1993
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